Sensor technologies

CyberOptics to Demonstrate High Precision Sensor Technologies at Touch Taiwan

Article from: CyberOptics Corp.

CyberOptics Corp. will showcase its IPS, WaferSense and NanoResolution MRS sensors for inspection and metrology at Touch Taiwan.

CyberOptics Corp. will present its Inline Particle Sensor (IPS), WaferSense wireless measurement sensors and NanoResolution Multi-Reflection Suppression (MRS) sensor for inspection and metrology at the Touch Taiwan Exhibition April 21-23 at Taipei Nangang Exhibition Center In Taiwan.

Cyberoptics IPS software with CyberSpectrum detects particles in gas and vacuum lines 24/7 in semiconductor processing equipment and other controlled environments. An extension of WaferSense Airborne Particle Sensor (APS) technology which is documented by the fabs as the Best Known Method (BKM), the IPS identifies, monitors and enables rapid troubleshooting of particles down to 0.1 µm.

“The desire for a contamination-free process environment, coupled with stringent manufacturing requirements, leads to the need for a state-of-the-art process to detect particles in gas and vacuum lines,” said Dr Subodh Kulkarni, President and CEO of CyberOptics. “The IPS can quickly identify when and where the particles are coming from, as well as the source, saving time and expense while maximizing throughput and tool availability. “

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Cyberoptics will also present the NanoResolution MRS sensor integrated into its WX3000 system for advanced packaging inspection and metrology at the slice level. It offers sub-micrometer accuracy on features as small as 25 µm. While retaining its ability to reject multiple spurious reflections, it adds the ability to capture and analyze specular reflections from shiny surfaces of solder balls, bumps and pillars, providing highly accurate inspection and metrology.

With data processing speeds of over 75 million 3D dots per second, the WX3000 system delivers production-grade throughput of over 25 wafers (300mm) per hour. A full 100% 3D / 2D inspection can be performed two to three times faster than alternative technologies.

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